Intel has evaluated wet etch tools from ACM Research for its 14A fabrication process, raising political and national security ...
AZoMaterials interviews Matt Wilding about how the EP-Replayer enables users to simulate previous etch runs in real time, helping them optimize End Point detection methods, and more. Can you start by ...
Applied Materials Inc. says it can do away with the middle etch stop layer in copper dual damascene/low k stacks and provide better critical dimension (CD) control with its new EnTek Centura chamber.
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